IEC 62047-6 pdf download

IEC 62047-6 pdf download Semiconductor devices – Micro-electromechanical devices – Part 6: Axial fatigue testing methods of thin film materials
1 Scope
This International Standard specifies the method for axial tensile–tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 μm and 1 0 μm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines. The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, and test piece fabrication by means of non-mechanical machining, including photolithography.
This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.
2 Normative references
The following referenced documents are indispensable for the application of this document. For dated references, only the edition cited applies. For undated references, the latest edition of the referenced document (including any amendments) applies. IEC 62047-2:2006, Semiconductor devices – Micro-electromechanical devices – Part 2: Tensile testing method of thin film materials
3 Terms and definitions
For the purposes of this document, the following terms and definitions apply.
3.1
maximum force
P max
highest algebraic value of applied force in a cycle
NOTE Adapted from ASTM E 1 823-05a [1 ] 1 .
3.2
minimum force
P min
lowest algebraic value of applied force in a cycle
NOTE Adapted from ASTM E 1 823-05a [1 ].
3.3
mean force
P mean
algebraic average of the maximum and minimum forces in constant amplitude loading, or of
individual cycles
NOTE Adapted from ASTM E 1 823-05a [1 ].
3.4
force range
ΔP
algebraic difference between the maximum and minimum forces in constant amplitude loading
3.5
maximum stress
σ max
highest algebraic value of applied stress in a cycle
3.6
minimum stress
σ min
lowest algebraic value of applied force in a cycle
3.7
mean stress
σ mean
algebraic average of the maximum and minimum stress in constant amplitude loading, or of individual cycles
3.8
stress range
Δ σ
algebraic difference between the maximum and minimum stresses in constant amplitude loading
3.9
maximum displacement
δ max
highest algebraic value of applied displacement in a cycle
3.1 0
minimum displacement
δ min
lowest algebraic value of applied displacement in a cycle
3.1 1
mean displacement
δ mean
algebraic average of the maximum and minimum displacement in constant amplitude loading,or of individual cycles
3.1 2
displacement range
Δ δ
algebraic difference between the maximum and minimum displacements in constant amplitude loading
3.1 3
force ratio
stress ratio
R
algebraic ratio of the minimum force (or the minimum stress) to the maximum force (or the maximum stress)