IEC 62047-6 pdf download Semiconductor devices – Micro-electromechanical devices – Part 6: Axial fatigue testing methods of thin film materials 1 Scope This International Standard specifies the method for axial tensile–tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 μm and 1 0 μm under...